National Centre for Plasma Science Technology

Biographical Details:

Stephen Daniels holds B.Eng in Electronic Engineering from DCU and a PhD from DCU earned while studying abroad at IMEC, Belgium and Philips Research, The Netherlands. He spent 8 years with Applied Materials, where he held a number of senior positions including Metallisation Technologist for Northern Europe and Global Cluster Team Manager. Following this he spent 3 years with Scientific Systems as Head of Research and Development, developing and marketing their flagship plasma process control product. Following this he spent a year at University College Dublin as manager of the Centre for Materials and Manufacturing Technology. In April 2004, he joined the Dept. of Electronic Engineering, DCU and in July 2005 was appointed Executive Director of the National Centre for Plasma Science and Technology. Dr. Daniels has founded several highly successful technology companies and in 2006 Dr. Daniels was the winner of the Mallin Invent Award for Innovation. Dr. Daniels has extensive management experience. He has led and managed large groups of highly qualified staff and on many occasions successfully led and completed large complex international projects.

Research Interests:

Dr. Daniels primary scientific technical competence is in the area of integrated circuit manufacturing processes and novel thin film deposition techniques. He also has extensive experience in product design and development. He has spent time working at Philips Research, IMEC and the Applied Materials laboratories in California, and maintains significant national and international linkages within the broader plasma and semiconductor processing industry. He has over 40 publications and patents in plasma processing and semiconductor materials processing.

Selected Peer Reviewed Journals

• Dr Stephen M Daniels. .
• D Gahan, S Daniels, C Hayden, D O' Sullivan and M B Hopkins. 2012. Characterization of an asymmetric parallel plate radio-frequency discharge using a retarding field energy analyzer. Plasma Sources Science & Technology, 21, 1
• O¿Mahony CC; Gubala, V Gubala; Gandhiraman, RP Gandhiraman; Daniels, S; Yuk, JS ; MacCraith, BD ; Williams DE;. 2012. Improving the sensitivity of immunoassays with PEG-COOH-like film prepared by plasma-based technique. Journal Of Biomedical Materials Research, Part B : Applied Biomaterials, 100A, 1, pp230-235.
• K. V. Rajani , F. Olabanji Lucas , S. Daniels , D. Danieluk , A. L. Bradley, A. Cowley, M. M. Alam and P. J. McNally. 2011. Growth of n type ã-CuCl with improved carrier concentration by pulsed dc sputtering; structural, electronic and uv emission properties. Thin Solid Films, 519, 18, pp6064-6068.
• M. M. Morshed, M. M. Alam, S. M. Daniels. 2011. Moisture Removal from Natural Jute Fibre by Plasma Drying Process. Plasma Chemstry and Plasma Processing,
• N O'Connor, V Milosavljevic and S Daniels. 2011. Development of a real time monitor and multivariate method for long term diagnostics of atmospheric dielectric barrier discharges (ADBDs): Application to He, He/N2 and He/O2 discharges. Review Of Scientific Instruments, 8, 11
• Milosavljevic V.; Ellingboe A. R.; Daniels S. 2011. Influence of plasma chemistry on oxygen triplets. The European Physical Journal - Applied Physics, 64, 2-3, pp437-445.
• M. M. Alam, S. Daniels and P. J. McNally. 2011. Evaluation of conduction mechanism and electronic parameters for Au/Organic-Inorganic CuCl hybrid film/ITO structures. Semiconductor Science And Technology, 26, 9
• Cotter J. J.; Maguire P.; Soberon F.; Daniels S, O¿Gara JO, Casey E. 2011. Disinfection of meticillin-resistant Staphylococcus aureus and Staphylococcus epidermidis biofilms using a remote non-thermal gas plasma. Journal of Hospital Infection 78, 3, pp204-207.
• Le Nam Cao Hoai; Gubala Vladimir; Gandhiraman Ram P.; S Daniels, D E Williams. 2011. Evaluation of Different Nonspecific Binding Blocking Agents Deposited Inside Poly(methyl methacrylate) Microfluidic Flow-Cells. Langmuir, 27, 14, pp9043-9051.
• O'Connor N.; Daniels S. 2011. Passive acoustic diagnostics of an atmospheric pressure linear field jet including analysis in the time-frequency domain. Journal Of Applied Physics, 110, 1
• M.M.Morshed, S.M. Daniels and M.S.J.Hashmi. 2011. Finite element method for predicting the cohesive strength of DLC film on 316L stainless steel by four point bend test and validation with experimental results. Advanced Materials Research, 264-265,, pp1823-1831.
• Christy Charlton, Vladimir Gubala, Ram P. Gandhiraman, Julie Wiechecki, Nam Cao Hoai Le, Conor Coyle, Stephen Daniels, Brian D. MacCraith, David E. Williams. 2011. TIRF Microscopy as a Screening Method for Non-Specific Binding on Surfaces. Journal Of Colloid And Interface Science, 354, 1, pp405-409.
• Popovic D. M.; Milosavljevic V.; Zekic A, Romcevic, N; Daniels S. 2011. Raman scattering analysis of silicon dioxide single crystal treated by direct current plasma discharge. Applied Physics Letters, 98, 5
• J Tynan, V J Law, P Ward, A M Hynes, J Cullen, G Byrne, S Daniels and D P Dowling. 2010. Comparison of pilot and industrial scale atmospheric pressure glow discharge systems including a novel electro-acoustic technique for process monitoring. Plasma Sources Science & Technology, 19, 1
• M. M. Morshed, S. M. Daniels. 2010. EFFECT OF POSITIVE PHOTORESIST ON SILICON ETCHING BY REACTIVE ION ETCHING PROCESS. Ieee Transactions On Plasma Science, 38, 6, pp1512-1516.
• Ram P. Gandhiraman, Cedric Volcke, Vladimir Gubala, Colin Doyle, Lourdes Basabe-Desmonts, Christian Dotzler, Michael F. Toney, Marcello Iacono, Robert I. Nooney, Stephen Daniels, Bryony James and David E. Williams. 2010. High Efficiency Amine Functionalization of Cyclo Olefin Polymer Surfaces for Biodiagnostics. Journal Of Materials Chemistry, 20, , pp4116-4127.
• V J Law, S Daniels, J L Walsh, M G Kong, L Graham and T Gans. 2010. Non-invasive VHF monitoring of low temperature atmospheric pressure plasma. Plasma Sources Science & Technology, 19, 3
• Vladimir Gubala, Nam Cao Hoai Le, Ram Prasad Gandhiraman, Conor Coyle, Stephen Daniels, David E. Williams. 2010. Functionalization of cyclo olefin polymer substrates by plasma oxidation: Stable film containing carboxylic acid groups for capturing biorecognition elements.. Colloids And Surfaces B: Biointerfaces, 81, 2, pp544-548.
• Kolodziejczyk B. Ellingboe A.R., Daniels S., Oksuz L., Oubaha M., Barry H., Copperwhite R., O'Dwyer K. MacCraith B.D. 2010. Effects of Ar and O2 additives on photopatternable sol-gel etching in an SF6-based plasma for planar lightwave circuit fabrication. Microelectronic Engineering, 87, 11, pp2071-2076.
• Nam Cao Hoai Le, Vladimir Gubala, Ram P. Gandhiraman, Conor Coyle, Stephen Daniels, David E. Williams.. 2010. Total internal reflection ellipsometry (TIRE) as a label-free detection technique for the monitoring of bioassays on a functionalized cyclo olefin polymer surface.. Analytical And Bioanalytical Chemistry, 398, 5, pp1927-1936.
• Gandhiraman R. P.; Gubala V.; Le Cao Hoai Nam,; Volcke, C .;Doyle C; James, B ; Daniels, S.; Williams, D. E.. 2010. Deposition of chemically reactive and repellent sites on biosensor chips for reduced non-specific binding. Colloids And Surfaces B: Biointerfaces, 79, 1, pp270-275.
• K. V. Rajani, S. Daniels, P. J. McNally, F. Olabanji Lucas and M. M. Alam. 2010. Ultra thin Cr transparent metal contacts by pulsed dc magnetron sputtering. Physica Status Solidi A-applied Research, 207, 7, pp1586-1589.
• Morshed M. M.; Alam M. M.; Daniels S. M. 2010. Plasma Treatment of Natural Jute Fibre by RIE 80 plus Plasma Tool. Plasma Science and Technology, 12, 3, pp325-329.
• C. Volcke*, R.P. Gandhiraman*, V. Gubala, Th. Cummins, G. Fonder, R. Nooney, Z. Mekhalif, S. Daniels, A.A. Cafolla and D.E. Williams. 2010. Reactive amine surfaces for biosensor applications, prepared by plasma-enhanced chemical vapour modification of polyolefin materials. Biosensors & Bioelectronics, 25, 8, pp1875-1880.
• F. Olabanji Lucas, P. J. McNally, A. Cowley, S. Daniels, L. Bradley, D. Danieluk and D. M. Taylor. 2009. Structural, optical and electrical properties of co-evaporated CuCl/KCl films. Physica Status Solidi B-basic Research, 6, S1, ppS114-S118.
• F.O. Lucas, P.J. McNally, S. Daniels, D.M. Taylor. 2009. Electrical properties of ã-CuCl thin films. Journal Of Materials Science-materials In Electronics, 20, 1, pp144-148.
• J Tynan, V J Law, B Twomey, A M Hynes, S Daniels G Byrne, D P Dowling. 2009. Evaluation of real-time non-invasive performance analysis tools for the monitoring of pilot plant atmospheric pressure plasma system. Measurement Science & Technology, 20, 11, pp117703-.
• M.M. Dudek, R.P. Gandhiraman, C. Volcke, A.A. Cafolla, S. Daniels, A.J. Killard. 2009. Plasma surface modification of cyclo-olefin polymers and its application to lateral flow bioassays. Langmuir, 25, 18, pp11155-11161.
• M.M. Dudek, R.P. Gandhiraman, C. Volcke, S. Daniels, A.J. Killard. 2009. Evaluation of a Range of Surface Modifications for the Enhancement of Lateral Flow Assays on Cyclic Polyolefin Micropillar Devices. Plasma Processes And Polymers (online), 6, 10, pp620-630.
• R.P. Gandhiraman, S.K. Karkari, S.M. Daniels, B.D. MacCraith. 2009. Influence of ion bombardment on the surface functionalization of plasma deposited coatings. Surface And Coatings Technology, 203, pp3521-3526.
• Ram P. Gandhiraman, Mohan Kumar Muniyappa, Magdalena Dudek, Conor Coyle, Cedric Volcke, Paul Burham, Stephen Daniels, Niall Barron, Martin Clynes, David C.Cameron. 2009. Interaction of plasma deposited HMDSO based coatings with fibrinogen and human blood plasma: the correlation between bulk plasma, surface characteristics and biomolecule interaction¿. Plasma Processes And Polymers (online), 7, 5, pp411-421.
• Law, VJ; Milosavljevic, V; O'Connor, N, Daniels, S. 2008. Handheld Flyback driven coaxial dielectric barrier discharge: Development and characterization. Review Of Scientific Instruments, 79, 9
• Lucas, FO; Mitra, A; McNally, PJ, Daniels, S. 2008. Morphological, optical and electrical properties of gamma CuCl deposited by vacuum evaporation. Journal Of Materials Science-materials In Electronics, 19, 2, pp99-101.
• Natarajan, G; Daniels, S; Cameron, DC, et al. 2008. Influence of target to substrate distance on the sputtered CuCl film properties. Thin Solid Films, 516, 16, pp5531-5535.
• Natarajan, G; Kumar, RTR; Daniels, S, et al. 2008. Electrical studies on sputtered CuCl thin films. Journal Of Materials Science-materials In Electronics, 19, 2, pp103-106.
• Lucas F.O., Mitra A., McNally P.J., Daniels S., Bradley A.L., Taylor D.M., Proskuryakov Y.Y., Durose K., Cameron D.C. 2007. Evaluation of the chemical, electronic and optoelectronic properties of y-CuCI thin films and their fabrication on silicon substrates. Journal Of Applied Physics, 40, , pp3461-3467.
• Mitra A., O'Reilly L., Lucas O.F., Natarajan G., Bradley A.L., McNally P.J., Daniels S., Cameron D.C., Reader A. 2007. CuCl films on silicon substrates: towards optoelectronic devices. Journal Of Luminescence,
• Mitra A., O'Reilly L., Lucas O.F., Natarajan G., Bradley A.L., McNally P.J., Daniels S., Cameron D.C., Reader A., Martinez-Rosas, M. 2007. CuCl films on silicon substrates: toward optoelectronic devices. Journal Of Luminescence,
• Natarajan G., Daniels S., Cameron D.C., McNally P.J. 2007. Influence of target to substrate distance on the optical properties of sputtered CuCl films. Thin Solid Films,
• Natarajan G., Mitra A., Daniels S., Cameron D.C., McNally P.J. 2007. Optimization of room temperature UV emitting y-CuCl thin films: Temperature dependent optical properties. Thin Solid Films,
• Natarajan G., Rajendra Kumar R.T., Daniels S., Cameron D.C., McNally P.J. 2007. Electrical studies on sputtered CuCI films. Journal Of Materials Science-materials In Electronics,
• Ram Prasad G., Daniels S., Cameron D.C. 2007. A comparative study of characteristics of SiOxCyHz, TiOx and SiO-TiO Oxide Based Biocompatible Coatings.
• Ram Prasad G., Daniels S., Cameron D.C. 2007. Variation in Surface Characteristics of SiOxCyHz Thin Films Deposited at Floating Potential and on Powered Electrode by PECVD. Thin Solid Films,
• Ram Prasad G., Daniels S., Cameron D.C. 2007. A Comparative Study of Characteristics of SiOxCyHz, TiOx and SiO-TiO Oxide Based Biocompatible Coatings. Plasma Processes And Polymers (print),
• Ram Prasad G., Mohan Kumar M., Barham P., Daniels S., Cameron D.C., Clynes M. 2007. Influence of Surface Characteristics of PECVD Deposited Silicon and Titanium Based Coatings on Fibrinogen Adsorption. Biomaterials,
• Ram Prasad G., Mohan Kumar M., Tully E., Daniels S., Cameron D.C., O'Kennedy R., Clynes M. 2007. The adhesion strength and sterilization stability analysis of Silicon and titanium based coatings for biomedical applications. Journal Of Biomedical Materials Research,
• Law V.J., Daniels S., Lalor J.F., Wooley S.J. 2006. Spectroscopy of an Atmospheric Plasma. Electronics Letters, 42, 12
• Lucas F.O., O'Reilly L., Natarajan G., McNally P.J., Daniels S., Taylor D.M., William S., Cameron D.C., Bradley A.L., Mitra A. 2006. Encapsulation of the heteroepitaxial growth of wide bandgap Y-CuC1 on silicon substrates. Journal Of Crystal Growth, 28, , pp112-117.
• Natarajan G., Daniels S., Cameron D.C., O'Reilly L., McNally P.J., Lucas O., Rajendra Kumar R.T., Reid I., Mitra A., Bradley L. 2006. Growth of CuCl thin films by magnetron sputtering for UV optoelectronic applications. Journal Of Applied Physiology, 100, 033520
• Natarajan G., Rajendra Kumar R.T., Daniels S., Cameron D.C., McNally P.J. 2006. Stoichiometry control of sputtered CuC1 thin films: Influence on ultra violet emission properties. Journal Of Applied Physics, 100, 9
• O'Reilly L., Mitra A., Natarajan G., Lucas O.F., McNally P.J., Daniels S., Cameron D.C., Bradley A.L., Reader A. 2006. Impact on structural, optical and electrical properties of CuC1 by incorporation of Zn for n-type doping. Journal Of Crystal Growth, 287, 139
• O'Neill F.T., Carr A.J., Daniels S., Gleeson M.R., Kelly J.V., Lawrence J.R., Sheridan J.T. 2005. Refractive elements produced in photopolymer layers. Journal Of Materials Science, 40, , pp4129-4132.
• O'Reilly L., Natarajan G., Lucas O.F., McNally P.J., Daniels S., Cameron D.C., Reader A., Mitra A., Martinez-Rosas M., Bradley A.L. 2005. Room temperature ultra-violet electroluminescence from a cubic semiconductor grown on near lattice¿matched silicon. Journal Of Applied Physics, 98, 113512
• O'Reilly L., Natarajan G., McNally P.J., Cameron D.C., Lucas O.F., Martinez-Rosas M., Bradley A.L., Reader A., Daniels S. 2005. Growth and characterisation of wide-bandgap, I-VII optoelectronic materials on silicon. Journal Of Materials Science-materials In Electronics, 16, , pp415-419.
• Ram Prasad G., Daniels S., Cameron D.C., McNamara B.P., Tully E., O'Kennedy R. 2005. PECVD of Biocompatible Coatings on 316L Stainless Steel. Surface And Coatings Technology, 200, 1-4, pp1031-1035.
• Daniels S., Wolters R.A.M., van Zijl J. Schildermans J. 2000. Ti/TiN/Ti(N) PVD liners for W-plug applications. Microelectronic Engineering, 50, 1-4, pp271-276.
• Beyer G.P., Maex K., Daniels S., Lee S., Proost J., Bender H., Judelewicz M., Maity N. 1999. Al Speed Fill. Materials Science In Semiconductor Processing, 2, , pp75-82.
• Daniels S., Cameron D.C. 1996. Examination of Thin Film Uniformity at the Bottom of a Hole Structure Using a 3D Sputter Simulation Package. Journal De Physique Iii, 6, , pp1213-1218.
• Kola P.V., Daniels S., Cameron D.C., Hashmi M.S.J. 1993. Magnetron Sputtering of TiN Protective Coatings. Journal Of Materials Processing Technology,

Selected Chapters

• Dr Stephen M Daniels. .

• Natarajan G., Mitra A., O'Reilly L., Daniels S., Cameron D.C., McNally P.J., Lucas O., Bradley L., Optical investigations on sputtered CuCI thin films, Materials Research Society Symposium, - ,
• Ram Prasad G., Daniels S., Cameron D.C., McNamara B.P., Tully E., O'Kennedy R., Adhesion improvement of plasma polymerized HMDSO fils on medical grade stainless steel by plasma pretreatment and layering, International Workshop on Plasma Polymers and Related Materials, October 2004, - , Antalya, Turkey
• Daniels S., Ryder J., Connolly P.T., Ahearne E., Hughes D., Validation and optimisation of a production process flow using a discrete event simulation package, International Manufacturing Conference, 2002, - , Cork, Ireland
• Natarajan G., Daniels S., Cameron D.C., O'Reilly L., McNally P.J., Plasma diagnostics for the RF phyical vapour deposition of CuCI thin films, 57th Gaseous Electronics Conference, September 2004, - , Ireland
• , , , - ,
• Ram Prasad G., Daniels S., Cameron D.C., McNamara B.P., Tully E., O'Kennedy R., Effect of plasma pretreatment on the adhesion of biocompatible films on 316L stainless steel deposited by plasma enhanced chemical vapour deposition of HMDSO, 57th Gaseous Electronics Conference, September 2004, - , Ireland
• Beyer G.P., Maex K., Daniels S., Maity N., Bassanini D., IMP liners for AI via speed fill, In: Materials Research Society ed.Advanced Metallisation Conference, 1998, - , USA, 433 -
• Daniels S., Cameron D.C., Monte Carlo Simulation of Particle Fluxes in the Magnetron Sputtering Processes, Advances in Materials and Processing Technologies, August 1995, - , , 953 - 958
• MacDonnell M., Daniels S., Managing critical issues for first stage technology start-ups involved in joint development projects, Annual Conference of the Irish Management Academy, September 2004, - , Dublin, Ireland
• Ram Prasad G., Daniels S., Cameron D.C., McNamara B.P., Tully E., O'Kennedy R., PECVD of biocompatible coatings on 316L stainless steel, 9th International Conference on Plasma Surface Engineering, September 2004, - , Garmisch-Partenkirchen, Germany
• R.P. Gandhiraman, C. Volcke, V. Gubala, R. Nooney, L. Basabe-Desmonts, S. Daniels, D.E. Williams, Stability Studies of Amine Functional Coatings Deposited by PECVD on COP Surfaces for Biosensor Applications.,, th International Conference on Biomedical Engineering, 03-DEC-09 - 06-DEC-09, Singapore
• Asif Riaz , Ram P. Gandhiraman , Ivan K. Dimov , Lourdes Basabe-Desmonts,Jens Ducre, Stephen Daniels, Antonio J. Ricco , and Luke P. Lee.,, Glass like thin film barrier on polymericmicrocavities, International Conference on Miniaturized Systems for Chemistry and Life Sciences (ìTAS 2009), 01-NOV-09 - 05-NOV-09, Jeju, Korea.
• R.P. Gandhiraman, V. Gubala, C. Volcke, R. Nooney, L. Basabe-Desmonts C.Doyle, B. James, S. Daniels, D.E. Williams, Amine functionalisation of biosensor surfaces by plasma polymerization, 4th International Conference on Surfaces, Coatings and Nanostructured Materials (Nanosmat2009), 19-OCT-09 - 22-OCT-09, Rome, Italy
• K.V Rajani, S.Daniels, F. Olabanji Lucas, M.M.Alam and P. J. McNally,, electrodes for optoelectronics industry based on ultrathin chromium films, Photonics Ireland Conf, 14-SEP-09 - 16-SEP-09, Kinsale, Cork
• M. M. Alam, F. Olabanji Lucas, S. Daniels and P. J. McNally, Synthesis, Structural and Optical properties of ã-CuCl hybrid films,, Photonics Ireland Conf.,, 14-SEP-09 - 16-SEP-09, Kinsale, Cork
• J Tynan, V J Law, B Twomey, A M Hynes, S Daniels G Byrne, D P Dowling, Multivariate analysis tools for performance monitoring of atmospheric pressure plasma,, XXIX International Conference on Phenomena in Ionized Gases, 12-JUL-09 - 15-JUL-09, Cancun, Mexico
• V J Law, Q T N Al-Gwari, D O¿Connell, M M Iqbal, G Cambell, S Daniels, Ion-acoustic wave interaction within a helium plasma linear jet: calculation of Te,, XXIX International Conference on Phenomena in Ionized Gases, 12-JUL-09 - 15-JUL-09, Cancun, Mexico
• V J Law, S Daniels, J L Walsh, M G Kong, L Graham and T Gans, Non-invasive monitoring of atmospheric pressure plasma, XXIX International Conference on Phenomena in Ionized Gases, 12-JUL-09 - 15-JUL-09, Cancun, Mexico
• Asif Riaz, Ram P. Gandhiraman, Ivan K. Dimov, Lourdes B. Desmonts, Antonio J. Ricco, Jens Ducr�e, Stephen Daniels, and Luke P. Lee., Thin film barrier formation in PDMS microcavities, In: In Khalil Najafi and Martin Schmidt, ed.Actuators & Microsystems (Transducers'09), 21-JUN-09 - 25-JUN-09, Denver, Colorado, USA, 1051 - 1054
• M. M. Alam, F. Olabanji Lucas, K.V. Rajani, D. Danieluk, A. L. Bradley, Barry Foy, S. Daniels and P. J. McNally,, Hybrid Organic¿Inorganic Spin-on- Glass CuCl Films for Optoelectronic Applications, European Materials Research Society Spring Meeting,, 08-JUN-09 - 12-JUN-09, Strasburg, France
• K.V. Rajani, S.Daniels, P.J. McNally, F. Olabanji Lucas, Ultra Thin Chromium transparent metal contacts by Pulsed dc Magnetron Sputtering, European Materials Research Society Spring Meeting,, 08-JUN-09 - 12-JUN-09, Strasburg. France
• R.P. Gandhiraman, V. Gubala, C. Volcke, R. Nooney, L. Basabe-Desmonts C.Doyle, B. James, S. Daniels, D.E. Williams, Amine functionalisation of cyclo olefin polymers by PECVD, 215th Electrochemical Society Meeting (ECS),, 24-MAY-09 - 29-MAY-09, San Francisco, USA
• V J Law, J Tynan, G Byrne, D P Dowling, and S Daniels, The application of multivariate analysis tools for non-invasive performance analysis of atmospheric pressure plasma, 2nd Chaotic Modeling and Simulation International Conference, 01-MAY-09 - 05-MAY-09, Chania, Grete, Greece
• V J Law, B Towmey, J Tynan, A Hynes, P Ward D P Dowling and S Daniels., Emerging electric-acoustic metrology for industrial and research atmospheric pressure plasma, 7Th EU-Japan JSPP 2009 (Joint Symposium on Plasma Processing)., 23-APR-09 - 26-APR-09, Liblice, Czech Republic
• C. Volcke, R.P. Gandhiraman, V. Gubala, Th. Cummins, G. Fonder, R. Nooney, Z. Mekhalif, S. Daniels, A.A. Cafolla and D.E. Williams, An optimization study on cyclo olefin copolymers surface functionalization, International Conference on Trends in Bioanalytical Sciences ICTBSB 2009, 26-JAN-09 - 27-JAN-09, Dublin, Ireland
• R.P. Gandhiraman, C. Volcke, V. Gubala, R. Nooney, L. Basabe-Desmonts, S. Daniels, D.E. Williams, Functionalisation of Cyclo Olefin Copolymers for Biosensor Applications.,, International Conference on Trends in Bioanalytical Sciences ICTBSB 2009, 26-JAN-09 - 27-JAN-09, Dublin, Ireland
• Gomathi Natarajan, R.T. Rajendra Kumar, D.C. Cameron, S. Daniels and P.J. Mc Nally, Stoichiometry and microstructure control of sputtered CuCl thin films: Influence on ultra violet emission properties, International Seminar in mathematical and experimental physics, 18-DEC-08 - 19-DEC-08, Coimbatore, India
• V. Milosavljeviæ, D. Kavanagh and S. Daniels, Effect of wafers on measurement of gas temperature in RF plasma, 61th Gaseous Electronics Conference, 14-OCT-08 - 17-OCT-08, Dallas, Texas, USA
• V. Milosavljeviæ, E. Ragnoli, S. Daniels, N. Macgearailt, S. McLoone and J. Ringwood, Plasma diagnostic through the five prominent oxygen triplets, 61th Gaseous Electronics Conference, 14-OCT-08 - 17-OCT-08, Dallas, Texas, USA
• V J LAW, J TYNAN, B TWOMEY, N O¿CONNOR, G BYRNE, D P DOWLING AND S DANIELS, MULTIVARIATE ANALYSIS OF AN INDUSTRIAL ATMOSPHERIC PRESSURE PLASMA GLOW DISCHARGE, 61st GASEOUS ELECTRONICS CONFERENCE, 14-OCT-08 - 17-OCT-08, Dallas, Texas, USA
• D. Popoviæ, V. Milosavljeviæ and S. Daniels, Determination of nitrogen density in direct current (dc) glow discharges, 24th Summer School and International Symposium on the Physics of Ionized Gases, 25-AUG-08 - 29-AUG-08, Novi Sad, Serbia
• F. Olabanji Lucas, P.J. McNally, A. Cowley, S. Daniels, L. Bradley, D. Danieluk and M.D. Taylor, Structural, Optical and Electrical Properties of Co-evaporated CuCl/KCl Films, Int. Conf. on Optical and Optoelectronic Properties of Materials and Applications 2008 (ICOOPMA 2008),, 20-JUL-08 - 25-JUL-08, Edmonton, Canada
• V J Law, B Twomey, N O¿Connor, D P Dowling and S Daniels., Visualization of atmospheric pressure plasma electrical parameters., CHAOS 2008, 02-JUN-08 - 06-JUN-08, Chania, Crete
• V J Law, B Twomey, N O¿Connor, D P Dowling and S Daniels, Object recognition within atmospheric pressure plasma, Irish Plasma and Beam Processing Group Conference, 08-MAY-08 - 09-MAY-08,
• N O¿Connor, B Twomey, V J Law D P Dowling and S Daniels, Optimisation of an In-line Atmospheric Pressure Plasma Process, Irish Plasma and Beam Processing Group Conference, 08-MAY-08 - 09-MAY-08, Dublin, Ireland
• E. Ragnoli, V. Milosavljeviæ, S. Daniels, N. Macgearailt, S. McLoone and J. Ringwood, Plasma diagnostic through the five prominent oxygen triplets, 19th Annual IEEE/SEMI® Advanced Semiconductor Manufacturing Conference, 05-MAY-08 - 07-MAY-08, Boston, Massachusetts, USA
• V. Milosavljeviæ, D. Kavanagh and S. Daniels, Experimental study of the effect of wafers on determination of gas temperature in RF plasma, 37th IOP Conference, 01-APR-08 - 04-APR-08, London, UK
• V. Milosavljeviæ, A. R. Ellingboe and S. Daniels, A role of Oxygen triplets in plasma diagnostic, 60th Gaseous Electronics Conference, 02-OCT-07 - 05-OCT-07, Arlington, USA
• Stephen Daniels, Combining Multiscale Modelling and In-Process Monitoring to Optimise CMP,¿ Recent trends in IC device manufacturing¿, Planarisation Technology Workshop, 17-AUG-07 - 17-AUG-07, UCD, Dublin, Ireland
• V. Milosavljeviæ, D. Popoviæ, A. E. Ellingboe and S. Daniels, Gas Temperature measurement in oxygen-nitrogen plasmas diluted by hydrogen,, VI Serbian Conference on Spectral Line Shapes in Astrophysics, 11-JUN-07 - 15-JUN-07, Serbia
• Milosavljevic V., Ellingboe A.R., Popovic D., Daniels S., Impact of plasma chemistsry on the 777nm oxygen triplet, Workshop on Radio Frequency Discharges, 11-JUN-07 - 13-JUN-07, Dublin, Ireland
• Law V.J., Daniels S., Novel atmospheric plasma drive circuits for biomedical processing, Workshop on Plasma Processes for Biomedical Applications, 24-MAY-07 - 24-MAY-07, Dublin, Ireland
• Law V.J., Daniels S., Gonzalvo Y.A., Seymour D., Greenwood C.L., Rees J.A., Whitmore T.D., Plasma plume chemistry for biomaterial processing, Workshop on Plasma Processes for Biomedical Applications, 24-MAY-07 - 24-MAY-07, Dublin, Ireland
• Ram Prasad Gandhiraman, Stephen Daniels, David C. Cameron, A Comparative Study of Characteristics of SiOxCyHz, TiOx and SiO-TiO Oxide-Based Biocompatible Coatings.,, 10th International conference on Plasma Surface Engineering (PSE 2006), 10-SEP-06 - 15-SEP-06, Garmisch-Partenkirchen, Germany
• G.Ram Prasad, M. Mohan Kumar, S. M. Daniels, D. C. Cameron and Martin Clynes,, Wettability and Adhesion Studies of Silicon-Titanium Oxide Based Biocompatible Coatings Deposited by PECVD, The 49th SVC Annual Technical Conference,, 22-APR-06 - 26-APR-06, Washington DC, USA
• Ram Prasad G., Daniels S., Cameron D.C., Tully E., O'Kennedy R., Biocompatible coatings with silicon and titanium oxides deposited by PECVD, 3rd Mikkeli International Industrial Coating Seminar, March 2006, 01-MAR-06 - 02-MAR-06, Mikkeli, Finland
• Natarajan G., Mitra A., O'Reilly L., Daniels S., Cameron D.C., McNally P.J., Lucas O., Bradley L., Optoelectronic Properties of RF Sputtered CuCI Thin Films, Materials Research Society Symposium, 28-NOV-05 - 02-DEC-05, Boston, USA
• Lucas O.F., O'Reilly L., Natarajan G., McNally P.J., Daniels S., Taylor D.M., William S., Cameron D.C., Encapsulation of the heteroepitaxial growth of wide bandgap CuCI on silicon substrates, 3rd International Conference on Advanced Materials (ICMAT), 03-JUL-05 - 08-JUL-05, Singapore
• O'Reilly L., Natarajan G., Lucas O.F., McNally P.J., Daniels S., Mitra A., Bradley L., Cameron D.C., Reader A., Ultra-violet electroluminescence using wide-bandgap CuCI on silicon, 3rd International Conference on Advanced Materials (ICMAT), 03-JUL-05 - 08-JUL-05, Singapore
• O'Neill, F.T., Carr A.J., Daniels S., Gleeson M.R., Kelly J.V., Lawrence J.R., Sheridan J.T., Photo-embossed optical elements and microfluidic lens fabrication, SPIE International Society of Optical Engineering, 04-APR-05 - 06-APR-05, Dublin, Ireland, 5825 -
• O'Reilly L., Natarajan G., McNally P.J., Daniels S., Lucas O.F., Mitra A., Martinez-Rosas M., Bradley A.L., The use of wide-bandgap CuCi on silicon for ultra-violet photonics, SPIE International Society of Optical Engineering, 04-APR-05 - 06-APR-05, Dublin, Ireland
• Natarajan G., Mitra A., O'Reilly L., Daniels S., Cameron D.C., McNally P.J., Lucas O., Bradley L., Structural and Optoelectronic Properties of Sputtered Copper (I) Chloride, SPIE International Society for Optical Engineering, 04-APR-05 - 06-APR-05, Dublin, Ireland