Registry
Module Specifications
Current Academic Year 2012 - 2013
Please note that this information is subject to change.
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| Description | |||||||||||||||||||||||||||||||||||||||||
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Present an overview of commercially important plasma sources, including the fundamental principles of their operation. Develop an understanding of the concepts required for choosing plasma sources for applications and evaluating source performance. Give the student a sound basis for the specification of critical performance parameters. Introduce modern techniques of plasma reactor modelling and give the student hands-on experience in using selected software packages. | |||||||||||||||||||||||||||||||||||||||||
| Learning Outcomes | |||||||||||||||||||||||||||||||||||||||||
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1. Outline the principles of plasma source operation and be able to distinguish between commercially important plasma sources. 2. Be familiar with the technical details of plasma source power supplies and coupling. 3. Evaluate the importance of plasma source performance parameters for its appropriate application. 4. Critically evaluate technical and sales literature and have the ability to prepare source specifications. 5. Communicate their ideas with their colleagues. | |||||||||||||||||||||||||||||||||||||||||
All module information is indicative and subject to change. For further information,students are advised to refer to the University's Marks and Standards and Programme Specific Regulations at: http://www.dcu.ie/registry/examinations/index.shtml |
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| Indicative Content and Learning Activities | |||||||||||||||||||||||||||||||||||||||||
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Indicative syllabus. Ionisation mechanisms, Source concepts and geometries, Electromagnetic sources, Atmospheric plasmas, Power supplies, Source models. | |||||||||||||||||||||||||||||||||||||||||
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| Indicative Reading List | |||||||||||||||||||||||||||||||||||||||||
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| Other Resources | |||||||||||||||||||||||||||||||||||||||||
| None | |||||||||||||||||||||||||||||||||||||||||
| Array | |||||||||||||||||||||||||||||||||||||||||
| Programme or List of Programmes | |||||||||||||||||||||||||||||||||||||||||
| MPV | MSc in Plasma and Vacuum Technology | ||||||||||||||||||||||||||||||||||||||||
| SMPP | Single Module Programme (Plasma) | ||||||||||||||||||||||||||||||||||||||||
| Timetable this semester: Timetable for PS512 | |||||||||||||||||||||||||||||||||||||||||
| Date of Last Revision | 29-JAN-09 | ||||||||||||||||||||||||||||||||||||||||
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