Registry

Module Specifications

Current Academic Year 2012 - 2013
Please note that this information is subject to change.

Module Title	Plasma Process Sensors
Module Code	PS514
School	School of Physical Sciences
Online Module Resources
Module Teacher	Paul Swift
NFQ level	8	Credit Rating	10
Pre-requisite	None
Co-requisite	None
Compatibles	None
Incompatibles	None

Description

Examine the most important diagnostic sensors which are used in process development and plasma reactor monitoring. Introduce a wide range of techniques which can be used to characterise industrial plasmas. Provide the students with the requisite knowledge and ability to choose and operate commercial diagnostic equipment. Give the student a critical appreciation of where and when specific techniques are applicable.

Learning Outcomes

1. Identify the important plasma parameters and their expected values in plasma applications.
2. Identity the fundamental principles of electrical, optical and particle measurement techniques.
3. Critically evaluate plasma sensor specifications using manufacturer's technical literature and technical literature.
4. Recognise process control issues and strategies for plasma processing.
5. Communicate their ideas with their colleagues

Workload	Full-time hours per semester
*Type*	*Hours*	*Description*
Moodle discussion	25	No Description
Total Workload: 25

All module information is indicative and subject to change. For further information,students are advised to refer to the University's Marks and Standards and Programme Specific Regulations at: http://www.dcu.ie/registry/examinations/index.shtml

Indicative Content and Learning Activities

Plasma Parameters.
Density, temperature, and particle distribution functions. Wall fluxes of charged and neutral species, energy distribution functions. Plasma emission. Plasma operating regimes.Electrical Measurements: Langmuir probes, magnetic probes, emission probes and other specialised probe concepts. Measurement of circuit parameters including current, voltage and power. Harmonic analysis for rf plasmas. Circuit characterisation and modelling.Optical and Spectroscopic Techniques: Fundamentals of emission of radiation by plasmas. Emission spectroscopy and actinometry. Absorption spectroscopy. Line shapes and broadening. Doppler broadening, Stark shift and other examples. Active techniques including Thompson scattering and LIF.Particle Measurement: Energy analysers, ion mass spectrometry. Process gas analysis in plasmas.Process Sensors: Quartz crystal monitors, laser interferometry and reflectometry, in-situ ellipsometry.Process Control: Process control strategies. Statistical process analysis. End point detection..

Assessment Breakdown
Continuous Assessment	45%	Examination Weight	55%

Course Work Breakdown
Type	Description	% of total	Assessment Date
Computerised test/exam	Five bi-weekly quizzes	15%	n/a
Performance evaluation	On-line discussions	10%	Every Week
Essay	One of one essays	20%	Week 10

Reassessment Requirement
Resit arrangements are explained by the following categories; 1 = A resit is available for all components of the module 2 = No resit is available for 100% continuous assessment module 3 = No resit is available for the continuous assessment component
This module is category 3

Indicative Reading List

Other Resources

None

Array

Programme or List of Programmes

MPV

MSc in Plasma and Vacuum Technology

SMPP

Single Module Programme (Plasma)

Timetable this semester: Timetable for PS514

Date of Last Revision

12-SEP-08