Registry
Module Specifications
Current Academic Year 2012 - 2013
Please note that this information is subject to change.
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| Description | |||||||||||||||||||||||||||||||||||||||||||||||||||||
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The purpose of this module is to introduce participants to the fundamental principles of vacuum technology and practice. In this module students will develop knowledge and skills relating to properties of gases, the problems associated with creating a vacuum environment under different vacuum regimes and the working principles and operating regimes of various vacuum pumps and vacuum sensors.The course aims to give students a full and thorough knowledge of these topics with emphasis placed on vacuum systems used in industrial plasma processing and trouble-shooting of vacuum problems.Students are expected to access all course material online, participate in online discussion groups where they can discuss the course material and set problems relating to the course material, and participate in various learning activities and continuous assessment tasks on a regular basis. | |||||||||||||||||||||||||||||||||||||||||||||||||||||
| Learning Outcomes | |||||||||||||||||||||||||||||||||||||||||||||||||||||
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1. Apply kinetic theory of gases to interpret gas behaviour under various conditions. 2. Identify different vacuum regions in terms of gas pressure. 3. Interpret gas flow in pipes in terms of laminar and turbulent flows. 4. Describe the properties of materials commonly used in modern vacuum systems that make them suitable. 5. Categorise the more commonly used vacuum pumps and discuss their advantages and disadvantages. 6. Classify and describe various vacuum guages in relation to principle of operation and vacuum region it is suitable for. 7. Solve applied problems relating to vacuum systems, identifying key properties and performing numerical calculations of relavent quantities. 8. Relate the material covered to various vacuum systems used in modern plasma processing tools. 9. Communicate these physics principles and their application to their collegues. | |||||||||||||||||||||||||||||||||||||||||||||||||||||
All module information is indicative and subject to change. For further information,students are advised to refer to the University's Marks and Standards and Programme Specific Regulations at: http://www.dcu.ie/registry/examinations/index.shtml |
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indicative syllabus. Gas Fundamentals & Kinetic Theory. Classification of Vacuum. Gas sources in a Chamber. Gas Flow Regimes. Gas Flow in Real Systems and Pipes. Vacuum Materials and Sealing Techniques. The Pumping Process. Vacuum Pumps. Pressure Measurement. Good Vacuum practice.. | |||||||||||||||||||||||||||||||||||||||||||||||||||||
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