Academic biography

Patrick McNally, BE, ScM, PhD, CEng, CPhys, FIEI, FInstP, SMIEEE, is Full Professor in the School of Electronic Engineering at Dublin City University (DCU), served as Head of the School of Electronic Engineering in DCU (2012-2015) and is currently Co-Director of the Nanomaterials Processing Laboratory (www.eeng.dcu.ie/npl) in DCU, Principal Investigator in the National Centre for Plasma Research & Technology (www.dcu.ie/ncpst), and a Funded Investigatorin Science Foundation Ireland’s I-Form Research Centre (www.i-form.ie). He has extensive interest in developing technologies from low TRL levels through to commercialisation. In 2010, he was Founding Director and CTO of Sonex Metrology Ltd, a company dedicated to non-destructive silicon wafer metrology, and was the developer of Radio Emission Spectroscopy, which is currently licensed to a Major Multinational Corporation. This technology is currently operational in at major semiconductor manufacturing fabs worldwide. He holds 9 patents in plasma and metrology technologies, and has published more than 300 journal articles and conference proceedings. He is a world leader in the field of Radio Emission Spectroscopy for plasma processing, advanced x-ray diffraction imaging technology, and non-destructive nanomaterials characterisation (including micro-Raman and photoacoustic spectroscopy techniques).