Prof
Patrick
McNally
Academic biography
Patrick McNally, BE,
ScM, PhD, CEng, CPhys, FIEI, FInstP, SMIEEE, is Full Professor in the
School of Electronic Engineering at Dublin City University (DCU), served as
Head of the School of Electronic Engineering in DCU (2012-2015) and is
currently Co-Director of the Nanomaterials Processing Laboratory
(www.eeng.dcu.ie/npl) in DCU, Principal Investigator in the National Centre for
Plasma Research & Technology (www.dcu.ie/ncpst), and a Funded Investigatorin Science Foundation Ireland’s I-Form Research Centre (www.i-form.ie). He has extensive interest in developing technologies
from low TRL levels through to commercialisation. In 2010, he was Founding Director and CTO of Sonex Metrology Ltd, a company dedicated to non-destructive silicon wafer metrology, and was the developer of Radio Emission Spectroscopy, which is currently licensed to a Major Multinational Corporation. This technology is currently operational in at major semiconductor manufacturing fabs worldwide. He holds 9 patents in plasma and metrology technologies, and has published more than 300 journal articles and conference proceedings. He is a world leader in the field of Radio Emission Spectroscopy for plasma processing, advanced x-ray diffraction imaging technology, and non-destructive nanomaterials characterisation (including micro-Raman and photoacoustic spectroscopy techniques).
Research interests
Radio Emission Spectroscopy techniquesAdvanced x-ray diffraction imaging technology.Copper halide materials and device development.