DCU Plasma Research Laboratory receives $1 million equipment donation from Lam Dublin,
19 March 2002

The Taoiseach, Mr Bertie Ahern td officially opened APEL, the Advanced Plasma Etch Laboratory, in the Plasma Research Laboratory at DCU with next-generation equipment valued at $1 million donated by Lam Research Corporation (today 19 March 2002). With this donation, the Plasma Research Laboratory will undertake primary research into improving plasma based semiconductor manufacturing.

Lam (headquartered in Silicon Valley, California,) is a leading supplier of wafer fabrication equipment to the semiconductor industry. Lam produces processing systems for etch, chemical mechanical planarization (CMP), and wafer cleaning - three of the most important steps in the device fabrication cycle.

Combined with HEA funding and Enterprise Ireland funding, the $1 million donation from Lam confirms DCU's position as the premier institution in Ireland for plasma science and places the Plasma Research Laboratory in a position to make a significant impact in the international field of advanced semiconductor manufacturing research.

Semiconductor companies use processing machines, such as the Lam ExelanÔ etch chamber included in the donation, to modify the surface of silicon wafers in order to make microchips. These processing machines depend on plasma - which is, in fact, ionised gas - to make the complex structures. The better the plasma, the finer and faster the chip. The diagnostic systems researched by Dr Ellingboe and his team will help identify and rectify faults that arise during the manufacturing process.

"We will use the equipment donated by Lam to better understand the plasma surface interaction and consequently to develop suites of diagnostics for the purpose of real-time plasma control" said Dr Ellingboe.

DCU has a tradition of marrying basic research with industrial applications. The team of six working on the donated equipment includes a post-doctoral researcher and three PhD students. Their research work will undoubtedly have practical applications in the semiconductor industry.

"We are very grateful to Lam for this most generous donation" continued Dr Ellingboe "and more particularly for their ongoing technical support during and post installation of the equipment."

The PRL team, currently 20 strong including 3 academic staff, is also engaged in fusion research. "The EURATOM funding has enabled the group to develop and maintain the core capabilities that demonstrated to Lam that we could fully exploit their equipment" stated Dr. Ellingboe, adding "The semiconductor relevant work is a spin-off of our participation in the European Fusion programme."

The other two academics in the group, Professor Miles Turner and Dr David Vender, use computer codes to simulate the plasma. Through simulation, they can see effects that are extremely difficult, even impossible to measure experimentally.

ENDS

For further information:

Eilis O'Brien: 01 700 5217
Maeve O'Byrne: 01 700 5493