Magnetron Sputtering applies high-technology coatings such as ceramics, metal alloys, organic and inorganic compounds by connecting the work piece and the substance to a high-voltage DC power supply in an argon vacuum system (10-2 to 10-3 mmHg). The plasma is established between the substrate (work piece) and the target (donor) and transposes the sputtered off target atoms to the surface of the substrate. When the substrate is non-conductive, e.g., polymer, a radio frequency (RF) sputtering is used instead.

Pirani Vacuum Gauge
Manufacturer: Edwards
Serial No: PRM10K

Pirani Vacuum Gauge
Manufacturer: Edwards
Serial No: PRM10K

Penning Vacuum Gauge
Manufacturer: Edwards
Serial No: CP25K

Pirani Penning (Vacuum Gauge Readout)
Manufacturer: Edwards
Serial No: 1005

Mass Flow Controller
Manufacturer: Tylan
Serial No:FC-280A

Mass Flow Readout & Controller
Manufacturer: Tylan
Serial No: RO-28

MDX Magnetron Drive
Manufacturer: Advanced Energy

RFX 1250
Manufacturer: Advanced Energy

Reactaflo

Control Gate Valve

Air Compressor

Baffle

Block Valve

Diffusion Pump

For operational manuals please choose from the following links:

• Mass Flow Controller
• Reactaflo
• Baffle
• Diffusion Pump
• Sputtering Manual

For service:

• Tylan General
  
  359 Van Ness Way,
  Torannce,
  California 90501
  
  Telephone: (213) 212-5512
  Fax No: (213) 212-5311
  
• MEGA TECH LIMITED
  
  Littleton Drive,
  Huntington, Staffordshire,
  WS12 4TS,
  UK.
  
  Telephone: +44 (0)1543
  Fax: +44 (0)1543 500066
  
  Website: www.megatechlimited.co.uk
• Varian
  
  121 Hartwell Avenue
  Lexington,
  Massachusetts 02173
  
  Telephone: (617) 861-7200